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Backside Wafer Marking Machine

Backside wafer marking machine,  using a high-precision positioning platform and closed-loop CNC system and being equipped with high- resolution CCD positioning techniques and AOI detection, marks wafer on its backside. Wafer is loaded/unloaded automatically.  And the machine has an independently-owned intellectual property.

Product advantages
Vision accuracy: ±10um; platform positioning repeatibility: ±5um; whole machine accuracy: ±50um
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Single head efficiency surpasses that of average duplex heads by even 50%,compatible with 8-/12-inch Foup, Cassette
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Equipped with wafer smoothing unit for soft wafer marking, and high-precision hardware for wafer warping≤12mm
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Laser: green laser; fan cooling; modular design
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